The Relationship Between Characteristics of DLC Film and Electron Temperature Measured by Optical Emission Spectroscopy

Abstract

Electron temperatures in Ne or Ar plasma produced by a dc magnetron sputtering source were measured by 2-D optical emission spectroscopy using a charge-coupled device camera. In addition, diamond-like carbon (DLC) films were prepared on glass plates using the same sputtering equipment. When increasing dc target current between 0.5 and 2.5 A, we observed a change in Raman spectra accompanied by increases in electron density and electron temperature. In Ar plasmas with a lower pressure and a higher target current, we obtained relatively hard DLC films, which is consistent with the change in the electron temperature.