Abstract

This paper presents the problem of Rayleigh surface waves which scatter over single surface inhomogeneities in the form of rectangular steps (downward or upward) or grooves. The reflection, transmission, and losses coefficients are calculated by means of the finite element method for waves propagating in isotopic silicon surface. The criterion of maximum value of reflection to losses (into the bulk) ratio is used to asses the optimal depth and width of the groove. The presented results are useful with regard to the Rayleigh surface waves reflectors in the optimization of periodic array of grooves.

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