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Abstract
MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, and manufacturing process of single or double-clamped resonators, and their applications in mass sensing, micromechanical thermal analysis, quantum detection, and oscillators are introduced in detail. The material properties, resonance mode, and application in different fields such as gyroscope of the hemispherical structure, microdisk structure, drum resonator are reviewed. Furthermore, the working principles and sensing methods of the surface acoustic wave and bulk acoustic wave resonators and their new applications such as humidity sensing and fast spin control are discussed. The structure and resonance performance of tuning forks are summarized. This article aims to classify resonators according to different structures and summarize the working principles, resonance performance, and applications.
Highlights
Accepted: 14 June 2021Microelectromechanical systems (MEMS) [1] and nanoelectromechanical systems (NEMS) resonators can be used as biosensing [2], mass sensing [3], and core vibration elements in circuits [4]
The results show that the decay time of the resonator can be greatly increased to 60.54 s, which is equivalent to a million-order (1.32 million) Qe f f [62]
Thermomechanical analysis of the phase transition characteristics of poly(lactic acid) (PLLA), when the temperature of the resonator increases, the resonance frequency of PLLA decreases due to the positive thermal expansion coefficient, while the glass characteristics emerged after 60 ◦ C, Young’s modulus increases, and the resonance frequency is determined by the negative thermal expansion coefficient of pyrolytic carbon starts to rise
Summary
Microelectromechanical systems (MEMS) [1] and nanoelectromechanical systems (NEMS) resonators can be used as biosensing [2], mass sensing [3], and core vibration elements in circuits [4]. The resonant structure is one of the important features of the resonators Various resonant structures, such as single or double-clamped beams, hemispherical shells [13], microdisks [14], and forks [15] have different applications and performances. Micromachines 2021, 12, 724 a higher frequency and quality factor than the double-clamped structure when there is only a compressive axial stress state [16]. MEMS/NEMS resonators have various structures, which can be used as mass sensing, oscillators, quantum spin coupling, filters, and gyroscopes. As the most common resonator in the MEMS field, the single or double-clamped beams resonant structure is introduced. Enumerate the hemispherical shell resonators, microdisk resonators, drum resonators, ring structure resonators, tuning fork resonators, SAW/BAW resonators, and introduce the design method of different structures, material characteristics, resonance performance, and application principles
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