Abstract

This work presents a solution for radiation hardness assessment using compact and productive X-ray facilities, as well as the automated measurement system. The radiation test procedure can be integrated in commercial IC's process as a mandatory option for providing high reliability and radiation hardened IC projects.Using the radiation test procedure as a one of technology stage, the assessment of total ionizing dose (TID) hardness was done for test structures, which were fabricated in conventional 65nm CMOS technology.

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