The Radial Distribution of Ions and Electrons in RF Inductively Coupled H2/T2B Plasmas

Abstract

A glow discharge polymer (GDP) was fabricated using trans-2-butene (T2B) and hydrogen (H2) via a plasma-enhanced chemical vapor deposition (PECVD) system. The uniformity of the GDP films was significantly affected by the radial distribution of the H2/T2B plasma parameters. The plasma properties while discharging by a multi-carbon gas source of mixed H2/T2B were investigated during the GDP deposition process. The main positive ions and ion energy distributions in inductively coupled H2/T2B plasmas were analyzed by energy-resolved mass spectrometer (MS), and the electron density and the effective electron temperature were mainly analyzed using a Langmuir probe. The MS results show that the main positive ions in the plasmas are \({\text{C}}_{ 2} {\text{H}}_{ 4}^{ + }\), \({\text{C}}_{ 2} {\text{H}}_{ 6}^{ + }\), \({\text{C}}_{ 3} {\text{H}}_{ 3}^{ + }\), \({\text{C}}_{ 3} {\text{H}}_{ 6}^{ + }\), \({\text{C}}_{ 3} {\text{H}}_{ 8}^{ + }\), \({\text{C}}_{ 4} {\text{H}}_{ 5}^{ + }\), \({\text{C}}_{ 4} {\text{H}}_{ 1 0}^{ + }\), \({\text{C}}_{ 5} {\text{H}}_{ 5}^{ + }\), and \({\text{C}}_{ 5} {\text{H}}_{ 7}^{ + }\) with mass-to-charge ratios (m/e) of 28, 30, 39, 42, 44, 53, 58, 65, and 67, respectively. For a normalized ion intensity, the relative intensities of saturated CH ions increase with increasing radial distance, while the unsaturated CH ions decrease with increasing radial distance. The ion energy distribution of \({\text{C}}_{ 2} {\text{H}}_{ 6}^{ + }\) (m/e = 30) presents a bimodal structure. Additionally, both the electron density and the effective electron temperature decrease with increasing radial distance.