Abstract
High accuracy mass flow measurement is an enabling technology at the base of many industries. HORIBA STEC Co., Ltd. developed its own primary gas mass flow measurement system. We employed the dynamic gravimetric method in a vacuum chamber, and we use only mass and time information for mass flow rate calculation, with no correction for temperature, pressure and humidity. The system achieved 0.036% uncertainty as lowest of results with satisfactory performance of proficiency testing with NIST (National Institute of Standards and Technology). Then the laboratory has been granted ISO/IEC 17025 accreditation since 2017. This paper describes the system details and uncertainty analysis.
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