The Pressure Influence on the Properties of S-Phase Coatings Deposited by Reactive Magnetron Sputtering

Abstract

Reactive magnetron sputtering of austenitic stainless steel in nitrogen containing atmosphere was used to deposit coatings composed of S-phase. The process was conducted at constant temperature (200 ◦C). The in uence of total and partial nitrogen pressure on coating characteristics was investigated. It was observed that both total and nitrogen partial pressures have in uence on coating composition and microstructure. Increasing nitrogen content in the S-phase coating can have a bene cial e ect on its corrosion characteristics. It was also found that coatings deposited in the ambient of high nitrogen contents are composed of S-phase and the additional high-nitrogen phase, which is of crucial in uence on mechanical properties of the coatings. It was also found that partial argon pressure can contribute to the changes in mechanical properties of the coatings.