The present status of electron probe microanalysis

Abstract

Few other analytical methods have expanded so rapidly as electron probe microanalysis during the past 10 years. The number of elements that can be determined or detected extends from beryllium to uranium and concentrations in the range 0.1—100 per cent can be dealt with. This has been made possible by the introduction of new analysing crystals and counting systems. The application of computer programming in conjunction with the various microprobe signals has allowed the development of valuable new methods for structural analysis. Even in commercial instruments, the electron beam can now be focused down to a diameter of 0•15 tm, hence the resolution of backscattered or secondary electron images is excellent and a large amount of information can be gained on the topography and morphology of solid substances. When integrators with proper discrimination are used, new information on diffusion systems, etc., in solid materials can be obtained. With all these possibilities, the position of electron microprobe analysis is now very strong. In addition to the use of x-rays for quantitative work, many other signals arising from the interaction of electrons with the target can be utilized.