Abstract
Chemical state analysis in EPMA examines changes in the characteristic X-ray spectrum reflecting the electronic structure of a specific element in a material. Waveforms of characteristic X-rays reflecting low energy electronic structures often change according to the chemical bonding state. Chemical state analysis in EPMA focuses on these changes in the waveform. This analysis determines the composition of the chemical state identifies the chemical state by comparing the waveforms of an unknown material and a reference material.
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