Abstract

The present paper is the first description on the preparation of B–Sb films by molecular flow region PVD method using the reaction of decaborane gas with evaporated antimony gas on Si(1 0 0) substrate at the temperatures 200–400°C. The cracking of evaporated Sb 2 into Sb 1 produced the films with the composition of amorphous B 12Sb 2 determined by X-ray photoelectron spectroscopy and infrared spectra. Ohmic metals of the films were examined by making evaporated Ag followed by annealing at 200°C.

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