Abstract
In this paper, we describe the potential use of polymer-derived ceramics (PDCs) for micro-sensors for high-temperature gas turbine applications. PDCs have several unique properties such as ease of microfabrication, excellent mechanical, materials and thermal properties, and tunable electrical conductivity. The electrical conductivity of PDCs with varied composition is measured as a function of temperature from room temperature upon to 700°C. Our results reveal that with suitable doping, the electrical conductivity could be controlled from insulating to semiconducting. Next, we measure the cure depth of the precursors as a function of UV intensity and exposure time. A model is developed to predict the cure depth as a function of photoinitiator concentration and light intensity. Good agreement between theory and experimental data is obtained. Finally, a few typical micro parts are fabricated by lithography technique.
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