Abstract
Here we present a critical review related to the important acoustic device technologies being used for gas sensing applications. Acoustic devices find wide applications in chemical and biological sensing due to miniaturized size, high sensitivity, integration with on-field electronics, ruggedness and wireless sensing ability. An overview on the acoustic devices such as quartz crystal microbalance (QCM), Film bulk acoustic wave resonators (FBAR), and surface acoustic wave resonators (SAW) is discussed with their working principle, selection of piezoelectric material, electrode material for fabrication, resonance frequencies, operation of the respective acoustic device-based gas sensors, temperature dependency and sensing layers for different gases. Recent advancements made in acoustic devices based on gas sensing technology, their structures and working mechanism along with their fabrication method, as well as the recent advances made in the design are reviewed and discussed.
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