Abstract
Porous silicon (PSi) was fabricated by using electrochemical anodic etching method. Then acid treatment and cathode reduction treatment were employed to improve the luminescence properties and stability of PSi material. Photoluminescence (PL) measurements and scanning electron microscope (SEM) were used to observe the luminescence properties and microstructure of samples, respectively. The results of PL measurements showed that the PL intensity and the stability of luminescence of samples after cathodic reduction and acid treatment were significantly improved. The SEM images showed that the porosity of PSi may be increased through the cathodic reduction treated.
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