The phase composition and stress development in ternary Ti–Zr–N coatings grown by vacuum arc with combining of plasma flows

Abstract

Ti–Zr–N coatings were grown by the method of condensation from a plasma phase in a vacuum with ion bombardment of sample surfaces while combining Ti and Zr plasma flows in a residual nitrogen atmosphere. The coatings were deposited at different arc currents of Ti and Zr cathodes. The elemental and phase composition, preferred orientation and residual stresses were studied by X-ray microanalysis (XMA) and X-ray diffraction (XRD), respectively. XMA studies show that multicomponent systems of different compositions are obtained, and the control of plasma flows gives the possibility to synthesize ternary nitrides of any composition. XRD analysis reveals the formation of ternary Ti–Zr–N solid-solution nitrides with a (111) preferred orientation. A correlation between the lattice parameter and elemental composition of Ti–Zr–N coatings is observed. It is found that the stress-free lattice parameter increases with decreasing Ti arc current. The residual stress is compressive and relatively large (∼ 6.5 GPa). The relation between the composition and the stress using the model of formation of ternary solid-solution nitrides with combination of plasma flows of Ti and Zr is discussed.