Abstract
This paper reports the design and the performance of a three-dimensional atom probe which was recently constructed at the Institute for Materials Research, Tohoku University. The new atom probe consists of both a reflectron type time-of-flight atom probe (ToFAP) and a position sensitive atom probe (PoSAP). These are controlled with a CAMAC based controlling system interfaced with a Macintosh computer. The performance of the reflectron type atom probe and the position sensitive atom probe is demonstrated.
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