Abstract
We report about the features of polycrystalline diamond coatings CVD synthesis in repetitively-pulsed plasma of abnormal glow discharge. The discharge burning time was varied from 0.5 to 10 ms with proportional pauses. The dependences of deposited diamond films growth rate on the durations of the discharge burning and pauses are presented. The mutual influence of two plasma filaments on each other and onto the substrate has unequivocally established. Raman spectroscopy, X-ray diffractometry and SEM were used for identification of phase composition and microstructure of deposited films. Implementation simplicity and reliability of the proposed discharge system may find application in diamond film deposition industries.
Highlights
We report about the features of polycrystalline diamond coatings CVD synthesis in repetitively-pulsed plasma of abnormal glow discharge
X-ray diffractometry and SEM were used for identification of phase composition and microstructure of deposited films
New data about the features of a pulsed discharge ignition and it’s burning at high pressures (> 100 Torr) is presented
Summary
THE PECULIARITIES OF CVD DIAMOND COATINGS SYNTHESIS IN ABNORMAL GLOW DISCHARGE PLASMA USING REPETITIVELY-PULSED MODE
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