Abstract
Focused beams of helium ions are a powerful tool for high-fidelity machining with spatial precision below 5 nm. Achieving such a high patterning precision over large areas and for different materials in a reproducible manner, however, is not trivial. Here, we introduce the Python toolbox FIB-o-mat for automated pattern creation and optimization, providing full flexibility to accomplish demanding patterning tasks. FIB-o-mat offers high-level pattern creation, enabling high-fidelity large-area patterning and systematic variations in geometry and raster settings. It also offers low-level beam path creation, providing full control over the beam movement and including sophisticated optimization tools. Three applications showcasing the potential of He ion beam nanofabrication for two-dimensional material systems and devices using FIB-o-mat are presented.
Highlights
Future breakthroughs in nanotechnology will rely on the ability to fabricate materials and devices by design, that is, to tailor both material properties and device geometries according to a sophisticated blueprint
These include high-level patterning with automation of magnetic multilayers, low-level patterning with automation of suspended graphene and low-level patterning and beam path optimization for gold on glass
Local variation of the dose using masks or focused ion beams leads to pure magnetic patterning without affecting the topography of the films [32]
Summary
Future breakthroughs in nanotechnology will rely on the ability to fabricate materials and devices by design, that is, to tailor both material properties and device geometries according to a sophisticated blueprint. All samples should be introduced into the vacuum system one day in advance to allow possible contaminants to desorb from the samples and be pumped out While these protocols can improve the technical conditions for the machining with light ions, other challenges such as small sputter rates and large interaction volumes persist. For complex pattern geometries, especially with curved edges, the available features of commercial patterning control software are not sufficient to even create the corresponding adapted beam paths To address these issues, we developed the pattern generation toolbox FIB-o-mat with a Python interface. Low-level beam path generation creates point clouds, which directly define the ion beam path
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