Abstract
The design and fabrication of the P88000 series of large area scientific CCDs are described. Fabrication is carried out using a wafer stepper and a photolithographic 'stitching' technique. One member of this series, the P88200, was designed specifically for the ESA XMM X-ray spectroscopy space mission, and has been fabricated on high resistivity epitaxial silicon to provide improved detection efficiency for X-rays in the energy range 1 to 10 KeV. Enhanced imaging performance in the near infra-red is also achieved. Further work to improve performance for X-rays in the energy range 0.1 to 1.0 KeV is briefly described. Details are given of X-ray quantum efficiency, readout noise, charge transfer efficiency and energy resolution. Studies have shown that the major effect of radiation is a deterioration in charge transfer efficiency.
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