Abstract

We report on Terahertz quantum cascade lasers with tapered waveguide structure operating at ≈ 103 μm. The tapered waveguide effect on the output power and the laser beam divergence are experimentally studied with the tapered angle ranging from 0° to 8°. It is found that the peak output power of the devices with same length reaches the maximum at about 5° ≈ 6° tapered angle. Meanwhile, the horizontal divergence angle of the laser beam can be greatly reduced. The existence of such optimal tapered angle is explained by the finite-element simulation with the consideration of the self-focusing effect for the devices with larger tapered angle.

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