The Origin and Formation Mechanism of an Inclined Line‐like Defect in 4H‐SiC Epilayers

Abstract

An inclined line-like defect in 4H-SiC epilayers originates from a threading screw dislocation intersecting the surface, and its orientation is controlled by the sign of the Burgers vector of the dislocation. The defect forms through the interaction of local spiral-growth associated with the threading screw dislocation and step-flow growth related to the substrate off-cut. For further details see article number 2100512 by Jawad Ul Hassan and co-workers.