Abstract
The technical requirements and development trends of optical filters applied in bioscience area were introduced in this paper. The related optical filters were mainly used in biomedical equipment which were based on biomedical optical testing methods, such as absorption photometric analysis, fluorescence analysis, and Raman analysis etc. To manufacture the optical filters, Plasma Assisted Reactive Magnetron Sputtering (PARMS) technology was used, super-multilayer precision thickness control methods and super-multilayer micro defect control technology were developed. The high performance optical thin film filters, with high transmission (T<sub>pk</sub>>95%), steep edge (OD6 cut-off steepness less than 1%) and deep blocking with neighborhood cut-off depth blocking better than OD7 were manufactured.
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