Abstract
Relaxor ferroelectric terpolymer, Poly (vinylidene fluoride-trifluoroethylene-chlorofloroethylene) can be applied in many modern electronics systems. In this paper, the terpolymer films were deposited on aluminum-coated silicon substrates by horizontal Langmuir-Blodgett technology. The X-ray diffraction pattern indicates that the films have good crystallinity. The optical dispersion of the films were measured by variable-angle spectroscopic ellipsometry over a range from 300–1300 nm. The data Ψ and Δ at multiple incident angels (θ = 75° and 85°) were fitted using the Cauchy model. The refractive index n, the extinction coefficient k and the thickness of each film were obtained.
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