The objective lens of the electron microscope with correction of spherical and axial chromatic aberrations.

Abstract

The paper describes the principle of operation of a relatively simple aberration corrector for the transmission electron microscope objective lens. The electron-optical system of the aberration corrector consists of the two main elements: an electrostatic mirror with rotational symmetry and a magnetic deflector formed by the round-shaped magnetic poles. The corrector operation is demonstrated by calculations on the example of correction of basic aberrations of the well-known objective lens with a bell-shaped distribution of the axial magnetic field. Two of the simplest versions of the corrector are considered: a corrector with a two-electrode electrostatic mirror and a corrector with a three-electrode electrostatic mirror. It is shown that using the two-electrode mirror one can eliminate either spherical or chromatic aberration of the objective lens, without changing the value of its linear magnification. Using a three-electrode mirror, it is possible to eliminate spherical and chromatic aberrations of the objective lens simultaneously, which is especially important in designing electron microscopes with extremely high resolution.