The novel fabrication of multi-metal layers embedded in PMMA polymer material

Abstract

Abstract In this research, it presented a novel manufacturing method that was derived from traditional hot embossing technology to fabricate the 3D multi-metal layers structure on polymethylmethacrylate (PMMA) polymer material. The fabrication processes were divided into three major parts that were the fabrication of molds, the hot embossing and hot embedding processes. In the fabrication process of molds, the photolithography techniques and electroplating were utilized to make the metal pattern on silicon and glass wafers as the molds. The metal layer deposited on the wafer could be pressed into the polymer material by hot embossing technology as temperature above glass transition temperature (Tg). When the temperature of polymer material was cooled below the Tg, the polymer was then to de-embossing and remove the wafer. After that, the metal layer could be transferred from silicon mold into the polymer material. Therefore, all of fabrication process and replicated to make multi-metal layers into the same polymer material to become a 3D structure.