Abstract
A continuous angle standard for a full circle (0°–360°) was developed at the National Institute of Metrology, China. A symmetrical distribution driving and vacuum preloading air bearing rotation structure was designed and built. The run-out errors of the rotational spindle are less than 50 nm. The interferential scanning angle encoder, with four scanning heads, provides 0.0017″ of resolution with small interpolation errors and enabled data output with the equal-division-average method. The Fourier component inverse transformation method is used to generate continuous compensation values. A full measurement uncertainty budget was performed with an estimation result of U = 0.05″ (k = 2). Finally, comparisons with existing NIM angle standards were performed to prove the reliability of this angle standard.
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