The new ultraviolet spectral responsivity scale based on cryogenic radiometry at Synchrotron Ultraviolet Radiation Facility III

Abstract

The recently completed upgrade of the Synchrotron Ultraviolet Radiation Facility (SURF III) at the National Institute of Standards and Technology (NIST) has improved the accuracy of radiometric measurements over a broad spectral range from the infrared to the soft x ray. The beamline 4 at SURF III is a cryogenic-radiometer based radiometric facility for the ultraviolet (UV) spectral range. The upgrade of SURF III has allowed us to use beamline 4 to improve the detector spectral power responsivity scales in the wavelength range from 125 to 320 nm. The achieved combined relative standard uncertainty is better than 0.5% over most of this spectral range. This is a significant improvement over the more than 6% relative standard uncertainty in this spectral range of the current scales maintained at the Spectral Comparator Facility (SCF) in the Optical Technology Division and the Far UV Calibration Facility in the Electron and Optical Physics Division. The new UV scale of beamline 4 was subsequently intercompared and transferred to the SCF and to the Far UV Calibration Facility to improve their UV scales and ensure consistency within NIST. The new scale established at beamline 4 improves NIST’s calibration capabilities for environmental monitoring, astrophysics, and the UV industry. The new scale also includes wavelengths such as 193 and 157 nm excimer laser wavelengths, which are of particular interest to the semiconductor photolithography industry.