Abstract
The new time-of-flight ERDA (TOF ERDA) spectrometer of the Hahn-Meitner-Institut Berlin is presented. It is located at a high-energy target position of the ion-beam laboratory (ISL). The great variety of ions from helium to xenon with variable energies up to several MeV/amu allows the determination of the distribution of all elements in the samples up to a depth of some micrometer. The measurement of the hydrogen concentration is possible with high efficiency. With the relatively large solid angle of 1.57 msr fast measurements with low ion beam currents are possible. The long flight path of 123 cm and a time resolution of about 180 ps enable a good mass and depth resolution.
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