Abstract
The new proton microprobe is characterized by modular mounting resulting in easy maintenance, low cost personal computer (PC) system and several new features. The most important of these being the design of the lens, its location inside the vacuum, and an elaborate system for beam monitoring. The PC system allows for all kinds of standard data acquisition, beam and target positioning and an automated and quick routine for beam profile analysis. The ionoptical properties fulfil the expectations, which is not true for the brightness delivered from a Penning ion source. Focusing to a submicron beam spot results therefore in a beam current of ≈1 pA only. Tuning to 100 pA enlarges the spot to 3 × 3 μm 2.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
