Abstract

The National University of Singapore nuclear microscope facility is based around a HVEC AN2500 single ended Van de Graaff accelerator and an Oxford Microbeams coupled quadrupole triplet focusing system. Particle induced X-ray emission (PIXE), nuclear or Rutherford backscattering spectrometry (RBS) and scanning transmission ion microscopy (STIM) can be carried out simultaneously. Data acquisition is carried out using a simple but flexible PC based system (Oxford Microbeams DAQ) and the data is analysed using a combined RUMP and GUPIX PC based interactive package (NUSDAN) acting under WINDOWS. Resolution tests using a calibration grid and a multi layer integrated circuit have shown the facility to be capable of 600 nm spot sizes for 2 MeV protons at currents suitable for microanalysis.

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