Abstract
The paper presents some results of multi-objective optimization for the multilayered membrane-type piezoceramic MEMS based transducers with perforated active PZT and intermediate diaphragms, covered by the protective plates, and a vacuum chamber. An influence of the protective plate elastic and viscous properties, the dimensions and the relative areas of the perforated holes on the sensitivity’s frequency response of the hydrophone was studied for the broadening and equalizes the operating frequency band. We optimize the key design’s parameters using the Pareto approach with the finite element (FE) model of coupled piezoelectric-acoustic problem for the hydrophone.
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