Abstract
Calibration of the stiffness of atomic force microscope (AFM) cantilevers is critical for industry and academic research. The multi-position calibration method for AFM cantilevers based on vibration is investigated. The position providing minimum uncertainty is deduced. The validity of the multi-position approach is shown via theoretical and experimental means. We applied it to the recently developed vibration method using an AFM cantilever with a normal stiffness of 0.1 N m−1. The standard deviation of the measured stiffness is 0.002 N m−1 with a mean value of 0.189 N m−1 and the relative combined uncertainty is approximately 7%, which is better than the approach using the single position at the tip of the cantilever.
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