The modulation and demodulation module of a high resolution MOEMS accelerometer

Abstract

A MOEMS accelerometer with high precision based on grating interferometer is demonstrated in this paper. In order to increase the signal-to-noise ratio (SNR) and accuracy, a specific modulator and an orthogonal phase-lock demodulator are proposed. Phase modulation is introduced to this accelerometer by applying a sinusoidal signal to a piezoelectric translator (PZT) amounted to the accelerometer. Phase demodulation module consists of a circuit design and a digital design. In the circuit design, the modulated light intensity signal is converted to a voltage signal and processed. In the digital part, the demodulator is mainly composed of a Band Pass Filter, two Phase-Sensitive Detectors, a phase shifter, and two Low Pass Filters based on virtual instrument. Simulation results indicate that this approach can decrease the noise greatly, and the SNR of this demodulator is 50dB and the relative error is less than 4%.