Abstract
We have followed the effects of heavy ion irradiation on the structural, electrical, andphotoluminescence properties of ensembles of silicon nanocrystallites embedded in a dielectric(SiO2) matrix. This was done as a function of the irradiation dose and the content of the Siphase. The results obtained can be accounted for self-consistently assuming that arelatively small dose of the irradiation enhances the crystallization while for higherdoses the irradiation enhances the amorphization. The corresponding processessuggest that tuning of the above properties can be achieved by swift heavy ionirradiation.
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