Abstract
The finite-difference time-domain (FDTD) technique has been applied to analyze electromechanical phenomena of thin-film bulk acoustic wave resonators (TFBARs) for the first time. To simulate several TFBARs that have one-dimensional (1-D) piezoelectric material variations, current-driven governing equations are discretized in spatial and temporal domain. The impedance characteristics are obtained by the proposed method and compared with the analytical solutions of the 1-D Mason model. Also, the values of lumped elements for the Butterworth Van Dyke (BVD) equivalent circuit are extracted. The results show that the proposed scheme has the potential to analyze the characteristics of arbitrary piezoelectric material embedded structures.
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