Abstract

Resistively heated filaments are used to evaporate material in a variety of deposition processes; however, due to the small diameters of these filaments it is often difficult to accurately determine the temperature of the filament and source material. This article describes a model to calculate the temperature of small Au droplet during resistive evaporation using a fine W-filament. As expected, changes in the current passing though the wire and the diameter of the wire strongly influence the temperature; as do, small variations in overall filament length, and the heat transfer coefficient. The temperature of the evaporant is controlled by the current supplied to the filament. At constant current the temperature increases steadily with time, leveling off as evaporation begins, and then increasing rapidly as the mass of the evaporant decreases.

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