Abstract
The race-track microtron can play two important roles in X-ray lithography: It can serve as a low energy injector (at 50–150 MeV) to compact synchrotron/storage rings which are either normal conducting or superconducting; or it can, in a superconducting version, serve as full energy injector (at e.g. 680 MeV) integrated with a surrounding superconducting storage ring, forming a compact synchrotron light source.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Paper version not known
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
