Abstract
The race-track microtron can play two important roles in X-ray lithography: It can serve as a low energy injector (at 50–150 MeV) to compact synchrotron/storage rings which are either normal conducting or superconducting; or it can, in a superconducting version, serve as full energy injector (at e.g. 680 MeV) integrated with a surrounding superconducting storage ring, forming a compact synchrotron light source.
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