Abstract
Nanocrystalline titanium diboride (TiB2) ceramics films were prepared on a high purity graphite substrate via chemical vapor deposition (CVD). The substrate was synthesized by a gas mixture of TiCl4, BCl3, and H2 under 1000 °C and 10 Pa. Properties and microstructures of TiB2 films were also examined. The as-deposited TiB2 films had a nano-sized grain structure and the grain size was around 60 nm, which was determined by X-ray diffraction, field emission scanning electron microscopy, and transmission electron microscopy. Further research found that a gas flow ratio of TiCl4/BCl3 had an influence on the film properties and microstructures. The analyzed results illustrated that the grain size of the TiB2 film obtained with a TiCl4/BCl3 gas flow ratio of 1, was larger than the grain size of the as-prepared TiB2 film prepared with a stoichiometric TiCl4/BCl3 gas flow ratio of 0.5. In addition, the films deposited faster at excessive TiCl4. However, under the condition of different TiCl4/BCl3 gas flow ratios, all of the as-prepared TiB2 films have a preferential orientation growth in the (100) direction.
Highlights
The titanium diboride (TiB2 ) is an interesting and very useful ceramic material
Takehiko Takahashi and Hideo Kamiya [21] investigated the influence of deposition temperature on the deposition phase using chemical vapor deposition (CVD) methods, the results show that TiB2 could be deposited above
It was found that the oriented growth was related to the ratio of TiCl4 /BCl3 from the orientation characteristics of the deposited layers investigated by X-ray diffraction shown in Figure 2 for a laser power 3 kW and laser scanning speed 2.5 mm/s
Summary
The titanium diboride (TiB2 ) is an interesting and very useful ceramic material. It displays many attractive properties such as high melting temperature, high hardness, high elastic modulus, erosion resistance, excellent chemical stability, and good thermal as well as electrical conductivity [1,2,3,4,5,6].TiB2 is widely applied as the evaporator boat in high vacuum metal films, the protection of weapons and armored vehicle [7,8,9]. The titanium diboride (TiB2 ) is an interesting and very useful ceramic material. It displays many attractive properties such as high melting temperature, high hardness, high elastic modulus, erosion resistance, excellent chemical stability, and good thermal as well as electrical conductivity [1,2,3,4,5,6]. The neutron absorption of boron coupled with the above-high-temperature properties makes TiB2 the best choice of control rod material for high-temperature nuclear reactors [10,11,12]. The outstanding properties of TiB2 depend on its microstructure. TiB2 crystallizes with a hexagonal structure with a P6/mmm space group [13,14].
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