The microstructure of multi-layer nc-Ca films on different substrates

Abstract

Multi-layer nanocrystalline Ca (nc-Ca) films were prepared by vacuum evaporation method, using three different materials as the substrate, namely CaF2(111), Si(100), and Si(111). The films can be stored in the air for a long time, and there was no obvious shedding phenomenon at room temperature. Nc-ca thin films on different substrates were characterised by XRD analysis, showed (111) preferred orientation. On CaF2(111), Si(100) and Si(111) substrates, the average grain size of calcium are 36.8 nm, 43.9 nm and 45.2 nm, respectively. By SEM analysis, there was a better surface morphology of the films on the CaF2(111) substrate.