The method of increasing COMPO contrast by linearization of backscattering characteristic η =f(Z)

Abstract

AbstractThe backscattered electron signal (BSE) in the scanning electron microscope (SEM) has been used for investigation of a specimen surface composition (COMPO mode). Creation of a material composition map is difficult because the dependence of backscattering coefficient η on the atomic number Z for Z > 40 is nonlinear. The method of increase in SEM resolution for the BSE signal by use of digital image processing has been proposed. This method is called the linearization of the η =f(Z) characteristic. The function approximating the experimental η =f (Z) dependence was determined by numerical methods. After characteristics linearization, the digital image in COMPO mode allows to distinguish between two elements with high atomic numbers if their atomic numbers differ by ΔZ = 1.