Abstract
Diamond-like carbon (DLC) films were deposited on 2Cr13 stainless steel, 40Cr and 20Cr low-alloy steel using a multi-function ion-beam assisted deposition device, and their mechanical performance and anti-corrosion behavior were studied. The results show that dual ion-beam bombardment and mixing technology raises the compound hardness of DLC film and substrate, which increases and then decreases with the increase of CH n + energy. The DLC films can increase the stability and reduce corrosion rate of substrates in corrosive solution by functioning as a physical barrier and restraining from anodizing. In addition, the DLC films can improve the steel substrate resistance to pitting corrosion remarkably. The DLC films may offer steel substrate a good protection from corrosion.
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