Abstract
We present an efficient method for the measurement of anisotropic stress in obliquely-deposited thin films based on fast Fourier transform (FFT) associated with a Gaussian filter. The method not only measures isotropic residual stress but also anisotropic stress in a thin film. The measurement of film stress anisotropy was performed by a Tyman-Green interferometer combined with the MATLAB program to analysis the captured interferograms. The surface topography of thin films was obtained by the fringe pattern analysis program based on FFT method. The surface profile of thin films was filtered by the Gaussian filter after the phase change was converted to surface height distribution. The results show that obliquely-deposited TiO2 thin films exhibit different anisotropic stresses.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
