Abstract
The aberrations of a magnetic quadrupole quadruplet lens used as a probe forming lens in a microprobe system have been studied with the grid shadow method. From a comparison of theoretical and experimental grid shadow patterns the system is shown to suffer from parasitic aberration (possibly from mechanical misalignments) as well as spherical aberration. Three magnetic octupole lenses were designed and built with the aim of correcting the spherical aberration. It was found that the parasitic aberration prevented complete correction of all spherical aberration by the three octupoles but the largest part of the spherical aberration, the cross terms, could be corrected with a single octupole.
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