Abstract

A revised L mode matching unit is used for the radio-frequency (RF) ion source test facility at Huazhong University of Science and Technology (HUST). The revised matching unit is composed of a series capacitance, a parallel capacitance and a RF transformer. The electrical parameters of the two capacitances are estimated when the RF transformer is approximated to be ideal. Without plasma, impedance matching for a nine turn RF coil and a six turn RF coil indicates that the approximation could work well. However, after plasma ignition, the matching condition becomes bad when impedance matching without plasma. Then impedance matching by frequency variation as well as the parallel capacitance tuning together is discussed to keep good matching condition in the running of the ion source.

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