Abstract

Tin is an important metal with new potential applications regarding the fabrication of novel devices. In this work the mass spectrum of a tin liquid metal ion source (LMIS) is studied in detail. Sn ++ was found to dominate in the beam both over Sn + and over cluster ions. By studying the behaviour of the relative intensities of Sn + and Sn ++, as a function of emission current, the conclusion is reached that both Sn + and Sn ++ are emitted as a result of direct field-evaporation from the liquid surface. Cluster ions form by ion impact-aided droplet disintegration.

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