Abstract
FePt thin films in the thickness range of 5∼40 nm, have been prepared by magnetron sputtering on MgO (001) substrates. The magnetic measurements have shown that the decrease in the thickness is helpful to improve perpendicular anisotropy of FePt thin films. The perpendicular anisotropy gradually changes to in-plane anisotropy with increase in the thickness leading to weaker (001) texture of FePt thin film. After vacuum annealing at 600°C, the 5 nm thick FePt thin film has been obtained with about 240 kA/m of perpendicular coercivity, good squareness and only about 7nm of average crystalline size, which is suitable for applications of future ultra high density perpendicular magnetic recording.
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