Abstract
AbstractWe have developed a new SEM imaging mode which we refer to as laser electron microscopy (LEM). In this technique, a thin sample is mounted on a diamond substrate and overcoated with a phosphor having a highly temperature dependent cathodoluminescence (CL) emission intensity. The sample is held at low temperatures (T < 95 K) and is irradiated through the diamond substrate with a laser. Localized areas of the sample that absorb the laser radiation heat, and transfer this heat to the nearby phosphor coating, which is being simultaneously probed by the raster scanned electron beam. Thus, one detects a cathodoluminescence image of only those areas of the sample where the laser is absorbed. With IR irradiation, this interaction mechanism produces an image resembling that of a darkfield monochromatic infrared microscope but with the improved spatial resolution of electron beam imaging. One can then image the distribution of distinct molecular species.
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