The Knife-Plane Configuration Model of CCP equipment from plasma corona discharge case

Abstract

This research discusses the concept of analytical calculations of current-voltage (I-V) characteristics in the case of corona discharges using an asymmetric electrode model (with a DC source), which is often called capacitively coupled plasma (CCP) equipment. This CCP equipment, which is almost similar in shape to capacitor equipment in conventional electrical equipment, has the characteristic of having an active electrode in an upright position above the position of a passive electrode (in a lying position) in the air. Another characteristic is that the lowest end of the active electrode has a sharp surface so that a large corona current flows out of the sharp surface towards the passive electrode. The (I-V) characteristic calculation method can be calculated using a geometric concept (based on the sharp surface at the tip of the active electrode) using a modified capacitance concept. For the case of an asymmetric model with an arrangement of active and passive electrodes perpendicular to each other, the capacitance calculation can use the knife-plane electrode configuration model.