The Kinetics and Mechanism of Formation of Anode Films on Single‐Crystal InSb

Abstract

Studies of the kinetics‐of‐formation and composition of anode films on several crystal faces of indium antimonide are reported. A marked dependence of oxidation rate on crystal face is observed at low fields, the (111) and (332) faces oxidizing at more than ten times the rate of the (110) and and faces. At high fields all faces oxidize at the same rate. Data are interpreted in terms of the detailed structure of and the theories of Cabrera and Mott and of Dewald. With one major exception, the composition effects, the data may be qualitatively understood in terms of these theories.