Abstract
A novel micro-coordinate measurement machine (micro-CMM) is introduced as a viable device to be used with high precision and high accuracy measurement of part dimensions in micron scale. This design considers eliminating Abbe error, and is intended to achieve submicron accuracy for a work envelope of at least (100 × 100 × 100) mm. In this study, a prototype of the new micro-CMM was built; a mathematical measuring model to explicitly define the coordinate of the probe in x, y and z directions have been represented. An algorithm to find the workspace was implemented. The error model of the machine was created and the effect of structural errors on probe position was studied analytically. The significance of each geometric parameter was studied in order to minimize the measuring error and achieve the best machine design. Finally, the results of the analytical error model were confirmed through a Monte Carlo analysis. Moreover, the real measurements of the micro-CMM were compared with the error model.
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