Abstract
Diamond-like carbon (DLC) films have been deposited on glass substrates using radio-frequency (r.f.) plasma deposition method. γ-ray, ultraviolet (UV) ray and neutron beam were used to irradiate the DLC films. Raman spectroscopy and infrared (IR) spectroscopy were used to characterize the changing characteristics of SP 3C–H bond and hydrogen content in the films due to the irradiations. It showed that, the damage degrees of the γ-ray, UV ray and neutron beam on the SP 3C–H bonds are different. Among them, the damage of γ-ray on the SP 3C–H bond is the weakest. When the irradiation dose of γ-ray reaches 10×10 4 Gy, the SP 3C–H bond reduces about 50% in number. The square resistance of the films is reduced due to the irradiation of UV ray and this is caused by severe oxidation of the films. Compared with that of the as-deposited one, the IR transmittance of the films irradiated by both γ-ray and neutron beam is increased to some extent. By using the results on optical gap of the films and the fully constrained network theory, the hydrogen content in the as-deposited films is estimated to be 10–25 at.%.
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